2628-16-2

Appearance：Liquid Colorless

Density：1.06

Boiling Point：260ºC

Melting Point：8ºC

Flash Point：88ºC

Refractive Index：1.539

Vapor Pressure：0.0125mmHg at 25°C

CAS NO: 2628-16-2

Methylchlorosilane, also known as chlorodimethylsilane, is an organosilicon compound with the molecular formula CH3SiCl3. It is a colorless, flammable liquid with a pungent odor. In addition to its industrial uses, it is also a hazardous air pollutant and a major cause of indoor air quality problems.

Methylchlorosilane is commonly used as a precursor to synthesize polymeric products, such as polycarbosilanes and polymers based on polycarbonates and polyimides. It is also used in production of semiconductor devices and for the synthesis of silanes. Methylchlorosilane is an important skin and eye irritant, and a respiratory and reproductive toxin when inhaled in large concentrations.

Methylchlorosilane is mainly produced as an industrial chemical for use in the synthesis of silicone polymers. Industrial applications for methylchlorosilane are often related to its use in the production of coatings and resins, as well as electronic components such as resistors and capacitors.

When used in semiconductor devices, methylchlorosilane reacts with hydrogen to form silicon hydrides and further reacts with either antimony or bismuth to form antimony or bismuth silicides. These materials are used in device gate dielectrics and contact formation, respectively. Methylchlorosilane is also used in plasma-enhanced chemical vapor deposition (PECVD).

Methylchlorosilane is a volatile organic compound (VOC) and can be present in the air of indoor spaces, leading to indoor air quality concerns if concentrations exceed the safety limits set by regulatory standards. VOCs are known to be irritants to the nasal and respiratory passages, in addition to causing headaches and dizziness. They are also known to react with other chemicals in the air to form photochemical smog, a major air pollutant.

For these reasons, methylchlorosilane is subject to stringent regulation, and workplace exposure to methylchlorosilane must be monitored and controlled. Proper protective clothing and equipment should be worn when working with methylchlorosilane, and exhaust ventilation should be used to minimize the risks associated with its use.